
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes
Process and device for the topographical inspection of surfaces
| DE 1993-4313057 A1: 19930421 |
| DE 1994-4413758 A: 19940421 |
| DE 4413758 C2: 19980917 |
| G01B0011 |
|
| Deutsch |
| Patent, Elektronische Publikation |
| Fraunhofer IPK () |
Abstract
The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.