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Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes

Process and device for the topographical inspection of surfaces

: Koerner, K.; Fritz, H.; Nyarsik, L.; Spur, G.; Uhlmann, E.

	DE 1993-4313057 A1: 19930421
	DE 1994-4413758 A: 19940421
	DE 4413758 C2: 19980917
	G01B0011

	Deutsch
	Patent, Elektronische Publikation
	Fraunhofer IPK ()

Abstract
The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.

: http://publica.fraunhofer.de/dokumente/PX-40620.html