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Title
Anlage zur Behandlung von Objekten unter Reinluftraum- Bedingungen
Date Issued
1994
Author(s)
Pokorny, W.
Mordau, R.
Mueller, B.
Bartz, L.
Patent No
1992-4220827
Abstract
In a system for handling objects under cleanroom conditions, an automatic, multi-stage handling of an object (11) based on the single chamber principle can be performed in at least one process chamber (1) involving the inflow and outflow of fluids (4, 5, 15, 21, 24, 31), a chamber pot (3) and a removable chamber cover (2) in such a way that the process chamber (1) is formed for the performance of several process steps for handling the objects (11). The object (11), for example a wafer, is arranged in the process chamber (1), preferably on a rotating object support (13) in such a way that both sides can be handled with fluids simultaneously.
Language
de
Patenprio
DE 1992-4220827 A: 19920625