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Angle-resolved x-ray photoelectron spectroscopy as a noninvasive characterization technique for the surface region of processed -Hg, Cd-Te

Winkelaufgelöste Röntgen-Photoelektron-Spektroskopie als nichtdestruktives Charakterisierungsverfahren für den Oberflächenbereich von prozesstechnisch behandeltem -Hg, Cd-Te
: Richter, H.J.; Seelmann-Eggebert, M.

Baars, J.W.; Longshore, R.E. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Future infrared detector materials
Bellingham/Wash.: SPIE, 1989 (Proceedings of SPIE 1106)
ISBN: 0-8194-0142-0
S.181-189 : Abb.,Lit.
Technical Symposia on Aerospace Sensing <1989, Orlando/Fla.>
Future Infrared Detector Materials Conference <1989, Orlando/Fla.>
Fraunhofer IAF ()
angle-resolved x-ray photoelectron spectroscopy; ARXPS; cadmium-zinc-tellurid; mercury-cadmium-telluride; nichtdestruktive Tiefenprofilanalyse; noninvasive depth profiling; Quecksilber-Kadmium-Tellurid; Röntgen-Photoelektronen-Beugung; winkelaufgelöste Röntgen-Photoelektron-Spektroskopie; x-ray photoelectron diffraction; XPD

The potential of angle-resolved x-ray photoelectron spectroscopy (ARXPS) for characterizing the surface region of processed compound semiconductor materials is explored with respect to depth-compositional profiling and with respect to assessing the crystalline surface structure. It is demonstrated by analyzing the sputtered surface region of a (Hg, Cd) Te wafer that ARXPS can readily distinguish between three different compositional zones regarding their sequence and their chemical nature in a depth region of about 50 A. The quantitative scaling of the depth profile is accomplished using a theoretical model of photoemission from a planar sample covered with two uniform overlayer. It is futher demonstrated, by analyzing a (Hg Cd) Te sample grown by liquid phase epitaxy on (111) oriented (Cd, Zn) Te, that azimuthal and polar variation in the angle-resolved photoemission of Hg, Cd and Te occur which are indicative of the phenomenon of x-ray photoelectron diffraction (XPD). The prominent m axima of the respective photoemissions were observed at three azimuthal angles (120 degree C periodicity) for a polar angle of about 35 degree C. A shift of 60 degree C betweeen the azimuthal maxima of the photoemission of Te and the metal atoms (Cd or Hg) is attributed to a reconstruction of the examined (111) surface.