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Title
Verfahren zur Regelung von Glimmentladungen mit pulsfoermiger Energieversorgung
Date Issued
2004
Author(s)
Kirchhoff, V.
Kopte, T.
Schulze, M.
Peters, C.
Patent No
1997-19703791
Abstract
A procedure for controlling glow discharge processes has pulse-shaped energy in-feed into at least two electrodes by control of a process parameter using a control circuit. The pulse frequency, period length or length of individual positive and/or negative half-waves of the energy fed in are measured. From the measured size, a signal is derived. By comparison of this with a given theoretical value, a difference signal is formed and with this, at least one process parameter is controlled. As a process parameter, the inert gas flow, reactive gas flow, inert gas/reactive gas mixture, discharge current, discharge voltage and discharge power are all controlled. ADVANTAGE - Low expense in apparatus and use of simple components, allowing stable, defined and guided process.
Language
de
Patenprio
DE 1997-19703791 A: 19970201