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Verfahren zur Modifizierung der Oberflaeche von Siliciumnitridsinterkoerpern

Verfahren zur Herstellung von Siliziumnitridsinterkoerpern mit modifizierter Oberflaeche (A1)
Process for manufacturing silicon nitride sintered compacts with modified surface
 
: Herrmann, M.; Taut, C.; Thiele, P.; Geyer, L.

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Frontpage ()

DE 1991-4141366 A: 19911214
DE 1991-4141366 A: 19911214
DE 4141366 C2: 19970123
C04B0035
Deutsch
Patent, Elektronische Publikation
Fraunhofer IKTS ()

Abstract
The invention relates to the field of design ceramics and refers to a process for producing silicon nitride sintered compacts with modified surface which find their application, for example, in aerospace or in mechanical engineering as wear parts. The invention is based on the problem that the high-temperature oxidation resistance of silicon nitride sintered compacts of known processes cannot be attained in the desired mass. The problem according to the invention is solved by the fact that after ion beam supported modification of the surface using Si, Al, rare earth metals or carbon, the coated sintered compact is annealed according to the following process: a) for oxides, annealing in air at 500-1100 C, b) for nitrides, annealing in a nitrogen-containing atmosphere at a pressure of 0.05 to 200 MPa at 500-1300C, c) with SiC or its compound, in an inert gas at 500-1300C.

: http://publica.fraunhofer.de/dokumente/PX-39443.html