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Verfahren zur kontaktlosen Messung elektrischer Spannungen in einem Messobjekt mit einer Isolatoroberflaeche und Vorrichtung zum Durchfuehren des Verfahrens

Process for the non-contact measurement of electrical voltages in an object under test having an insulator surface and device for performing said process
 
: Lackmann, R.; Weichert, G.

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Frontpage ()

DE 1991-4103410 A: 19910205
DE 1991-4103410 A: 19910205
EP 1992-902468 AW: 19920110
DE 4103410 C1: 19920806
EP 570389 B1: 19940914
G01R0031
G01R0019
Deutsch
Patent, Elektronische Publikation
Fraunhofer IMS ()

Abstract
In a process and a device for the non-contact measurement of electrical voltages in an object under test having an insulator surface, a primary electron beam is trained on the insulator surface of the object under test. The energy of secondary electrons of a secondary electron flow generated on the insulator surface of the object under test is measured in order to derive the potential of a conductive zone located under the insulator surface of the object under test. To increase measurement accuracy, an electrical resonant field above the object under test is designed as an alternating field in the invention, and the energy measurement of the secondary electrons is performed in synchronization with the alternating field.

: http://publica.fraunhofer.de/dokumente/PX-39394.html