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Verfahren zur Kennzeichnung und zur Identifikation von Halbleiterscheiben

Process for recognition and identification of semiconductor wafers
 
: Spratte, H.H.; Schaefer, W.

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Frontpage ()

DE 1992-4207524 A: 19920310
DE 4207524 C2: 19950601
H01L0021
Deutsch
Patent, Elektronische Publikation
Fraunhofer IPA ()

Abstract
The invention relates to a process for the recognition and identification of a semiconductor wafer (1) by means of a code (2) applied to the surface of the semiconductor wafer (1), said code being decodable by means of a scanning system (3), whereby the code (2) in the edge area of the semiconductor wafer (1) is applied as the result of code symbols (4) formed as recesses.

: http://publica.fraunhofer.de/dokumente/PX-39389.html