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Verfahren zur Herstellung von polykristallinen Diamantschichten

Process for the production of polycrystalline diamond coatings
 
: Boettger, E.; Bluhm, A.; Jiang, X.; Schaefer, L.

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Frontpage ()

DE 1993-4331701 A: 19930917
DE 1993-4331701 A: 19930917
DE 4331701 A1: 19950323
H01L0029
Deutsch
Patent, Elektronische Publikation
Fraunhofer IST ()

Abstract
The invention relates to a process for the production of polycrystalline diamond layers on substrates with basically known process gases such as hydrogen, methane, oxygen or similar, by means of a CVD process, whereby the growth phase of the diamond layer is performed in the presence of an additional process gas which consists of N<-2 and/or nitrogen-containing gas mixtures such as air or N<-2 /H<-2 and/or nitrogen-hydrogen, nitrogen-oxygen or nitrogen-halogen compounds and/or mixtures of the nitrogen compounds described above with gases such as oxygen or hydrogen, whereby nitrogen is part of the process gas with 0.005 to 1 percent by volume or there is a relation of nitrogen to carbon (N/C ratio) of 0.001 to 0.2 of the total process gas.

: http://publica.fraunhofer.de/dokumente/PX-39342.html