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Verfahren zur Herstellung von feinteiligen chloridfreien Siliciumcarbonitridpulvern

Process for the production of fine chloride-free silicon carbon nitride powders
: Boden, G.; Herrmann, M.; Michael, G.

Frontpage ()

DE 1993-4303106 A: 19930204
DE 1993-4303106 A: 19930204
DE 4303106 C2: 19970116
Patent, Elektronische Publikation
Fraunhofer IKTS ()

The invention relates to the field of anorganic chemistry and ceramics, and the powder produced according to the invention can be processed, e.g. into nano-size ceramic Si<-3 N<-4 /SiC materials. The technical problem of the invention is to produce a powder, which can be used to produce Si<-3 N<-4-SiC composite materials with enhanced high-temperature properties, is solved by producing a mixture comprising vaporizable polysiloxanes containing a C-Si relationship of 1.5 to 4, which is vaporized at a temperature below the sublimation temperature of ammonium cloride and/or alkyl ammonium chloride in a protective gas or reactive gas flow comprising N<-2 or Ar or He and H<-2 and/or NH<-3, and finally pyrolized in the reactive gas flow at 600 to 1400 degrees Celsius for at least 1 s