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Verfahren zur Herstellung von Diamantschichten
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Title
Verfahren zur Herstellung von Diamantschichten
Date Issued
1994
Author(s)
Jiang, X.
Six, R.
Klages, C.-P.
Patent No
1992-4235015
Abstract
The invention relates to a process for the production of diamond layers on substrates containing Fe by means of CVD, whereby prior to the vapour-deposition of the diamond on the substrate containing Fe, a SiC barrier layer is deposited
Language
de
Institute
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=4235015A
Patenprio
DE 1992-4235015 A: 19921016