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Title
Verfahren zum Erzeugen von Strukturen aus Nanoteilchen
Date Issued
2002
Author(s)
Hartmann, E.
Radojkovic, P.
Schwartzkopff, M.
Marquardt, P.
Steinberger, H.
Patent No
1996-19619287
Abstract
The method involves the deposition of individual or numerous NANO-particles on the substrate after which selected particles are fused with each other and/or with the substrate. The fusion takes places preferably after positioning selected NANO-particles defining a functional structure, or an electronic component. Typically the selective positioning is carried out by using a raster or grid probe microscopy, whose voltage pulse duration, amplitude, and polarity is adjusted according to preset parameters. A raster probe, or power microscope may be used. The fusing may comprise controlled voltage and current increase. ADVANTAGE - Rational manufacturing facility with reduced capability to produce flaw.
Language
de
Patenprio
DE 1996-19619287 A: 19960513