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Verfahren zum beruehrungslosen Messen von Spannungen innerhalb von integrierten Schaltungen

Process for the contactless measurement of voltages within integrated circuits
 
: Lackmann, R.

:
Frontpage ()

DE 1994-4400949 A: 19940114
DE 1994-4400949 A: 19940114
DE 4400949 C1: 19950614
G01R0031
Deutsch
Patent, Elektronische Publikation
Fraunhofer IMS ()

Abstract
In order to measure the conductor voltage within an integrated circuit, said circuit is covered with a layer of liquid crystal onto which a glass plate provided with a light-transmitting counter-electrode is lowered. A pulsed voltage is applied to the counter-electrode, said pulsed voltage being in a fixable temporal relationship with the conductor voltage within the integrated circuit. High-frequency conductor voltages at frequencies above the limit frequencies of the orientation of the molecules of the liquid crystal are optically detectable.

: http://publica.fraunhofer.de/dokumente/PX-38779.html