Verfahren zum Aufbringen einer UV- und/oder elektronenstrahlempfindlichen Lackschicht
Date Issued
1998
Author(s)
Klumpp, A.
Hacker, E.
Patent No
1992-4202652
Abstract
Varnish coatings sensitive to UV and/or electron beam radiation were previously applied as a masking layer on the substrate using the spin-on process. In the process according to the invention for applying the varnish coating sensitive to UV and/or electron beam radiation, a substance containing vinyl and a linear or cyclical siloxane are vaporized and then deposited in the chemical vapour phase on the substrate to be masked. According to a main feature, the substance involves octamethylcyclotetrasiloxane and trivinyl methyl silane.