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Verfahren zum Aufbringen einer UV- und/oder elektronenstrahlempfindlichen Lackschicht

Process for the application of a varnish coating sensitive to UV and/or electron beam radiation
 
: Klumpp, A.; Hacker, E.

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Frontpage ()

DE 1992-4202652 A: 19920130
DE 1992-4202652 A: 19920130
EP 1992-919329 A: 19920910
DE 4202652 C2: 19960328
EP 624262 B1: 19980506
G03F0007
Deutsch
Patent, Elektronische Publikation
Fraunhofer IZM ()

Abstract
Varnish coatings sensitive to UV and/or electron beam radiation were previously applied as a masking layer on the substrate using the spin-on process. In the process according to the invention for applying the varnish coating sensitive to UV and/or electron beam radiation, a substance containing vinyl and a linear or cyclical siloxane are vaporized and then deposited in the chemical vapour phase on the substrate to be masked. According to a main feature, the substance involves octamethylcyclotetrasiloxane and trivinyl methyl silane.

: http://publica.fraunhofer.de/dokumente/PX-38755.html