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Analytic expressions for ion reflection from amorphous targets

: Wierzbicki, R.J.; Biersack, J.P.


Radiation effects and defects in solids 127 (1994), S.341-347
ISSN: 1042-0150
Fraunhofer IIS B ( IISB) ()
analytical description; ion implantation; ion reflection; Monte Carlo methods; simulation

We could unify the individual reflection data into simple analytical expressions. The formulas introduced in this paper may be useful for further theoretical studies and practical applications. The precision of our approach can still be improved, if the reflection coefficients, R subN and R subE for one energy only are known from an individual calculation or measurement. In this case the analytic curve K subN (Epsilon) or K subE (Epsilon) must be shitted in Figure 5 up or down to fit the given data point.