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1991
Conference Paper
Titel
Upscaling of the hot-filament CVD process for deposition of diamond films on large-scale substrates
Abstract
Experiments aiming at the development of a large-area hot-filament diamond CVD process have shown, that-aside from filament material and design considerations-the transport of gas species to the growth front of the polycrystalline diamond film deserves special attention. The present paper reports investigations on a four-filament set-up used to coat 2 inch diameter substrates. In oxygen-free atmospheres, satisfying results were obtained with thick, uncoiled Ta filaments, arranged vertically. Local diamond growth rate distributions obained with methane and acteylene as carbon sources under free and forced convection conditions reveal, that the filaments, aside from their role as hydrogen atom sources, possibly may at as sinks for growth species due to their conversion to acetylene.