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Ultrasonic transducer with silicon membrane for liquid nebulization

Ultraschallaktuator mit Siliziummembrane zum Flüssigkeitszerstäuben
: Paneva, R.; Temmel, G.

Graaff, H.C. de; Kranburg, H. van:
ESSDERC '95. 25th European Solid State Device Research Conference. Proceedings
Editions Frontieres, 1995
ISBN: 2-86332-182-X
European Solid State Device Research Conference <25, 1995, The Hague>
Fraunhofer IIS B ( IISB) ()
Aktuator; Flüssigkeit; membrane; nichtlineare Schwingung; Oberflächenwelle; Schwingung; Schwingungsmode; Selbstorganisation; silicon; Silizium; transducer; Zerstäuben; ZnO

The possibility to derive thin Si membranes into nonlinear vibrations using piezoelectric ZnO layers was shown. In the driving frequency range up to 200 kHz, membrane natural vibration modes, subharmonic modes wore detected. A lot of the subharmonic vibration modes had vibration amplitudes of several micrometers. Surface acoustic wave (SAW) generation in liquid films was monitored. For nebulization purposes a high mode resonance together with a large vivbation amplitude was necessary. The drop formation was associated with the destruction of SAWs. Suitable working regirnes for nebulization were those where no self- organization in the liquid film could take place. The process of self-organisation depended on the liqiud film thickness and on the membrane vibration amplitude.