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Ultrasonic transducer with silicon. A well known material with new applications

: Paneva, R.; Temmel, G.; Ryssel, H.


Sensors and Actuators. A A51 (1995), Nr.1, S.67-70
ISSN: 0924-4247
Symposium A on Microstructuring and Microsystems of the 1995 E-MRS Spring Conference <1995, Strasbourg>
Fraunhofer IIS B ( IISB) ()
nonlinear vibration; silicon; ultrasonic transducer

The vibrations of piezoelectric driven (ZnO) thin silicon membranes up to 200 kHz are studied. Non-linear vibrations with amplitudes of several micrometers for subharmonic frequency produce considerable ultrasonic radiation. The application of the discussed structure as a liquid nebulizer is investigated. A high-order mode vibration with large amplitude is a necessary condition for the generation of surface acoustic waves in the liquid film and drop formation.