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1991
Journal Article
Titel
A thin film polysilicon-aluminium thermocouple
Abstract
A thermocouple detector for infrared radiation is presented. The sensor is made with silicon planar technology. It has a diaphragm of silicon nitride, which is heated by the radiation. The temperature difference is measured by thermocouples of silicon and aluminium. The sensor has a sensitivity of E= 55 V/W and time constant of 15 ms.