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A thin film polysilicon-aluminium thermocouple

 
: Kühl, K.; Lang, W.

Sensors and Materials : S and M 2 (1991), Nr.5, S.247-251
ISSN: 0914-4935
Englisch
Zeitschriftenaufsatz
Fraunhofer IFT; 2000 dem IZM eingegliedert
infrared detector; thermocouple

Abstract
A thermocouple detector for infrared radiation is presented. The sensor is made with silicon planar technology. It has a diaphragm of silicon nitride, which is heated by the radiation. The temperature difference is measured by thermocouples of silicon and aluminium. The sensor has a sensitivity of E= 55 V/W and time constant of 15 ms.

: http://publica.fraunhofer.de/dokumente/PX-36507.html