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A thermoelectric infrared radiation sensor with monolithically integrated amplifier stage and temperature sensor


Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
CMOS-Technik; Infrarotdetektor; monolithisches Sensorsystem; SIMOX; Thermosäule

We report on a monolithic integrated infrared sensor system consisting of a thermopile, a sensor measuring the chip temperature and an amplifier stage fabricated in a CMOS process on SIMOX (Separation by IMplanted OXygen) wafers. A responsivity of 209 V/W and a normalized detectivity D* of 1.3EXP8 cmúHz«/W were found for thermopiles with single crystalline p-Si/n-Polysilicon thermocouples on silicon oxide/silicon nitride membranes. A first analysis of the thermal influence of the power consumed by the circuitry on the thermopile voltage indicates, that the sensor performance is not deteriorated by the integrated electronic circuitry.