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Thermally driven microvalve with buckling behaviour of pneumatic applications
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1994
Conference Paper
Titel
Thermally driven microvalve with buckling behaviour of pneumatic applications
Author(s)
Lisec, T.
Hoerschelmann, S.
Quenzer, H.J.
Wagner, B.
Benecke, W.
Hauptwerk
MEMS '94. IEEE Workshop on Micro Electro Mechanical Systems
Konferenz
Workshop on Micro Electro Mechanical Systems (MEMS) 1994
DOI
10.1109/MEMSYS.1994.555590
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT