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Table motion systems

: Weck, M.; Bispink, T.

Weck, M. ; Association Nationale de la Recherche Technique -ANRT-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining of elements with optical and other submicrometer dimensional and surface specifications : 2-3 April 1987, The Hague, The Netherlands; Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering
Bellingham/Wash.: SPIE, 1987 (Proceedings of SPIE 803)
ISBN: 0-89252-838-9
S.144 : Abb.
Conference "Micromachining of Elements with Optical and other Submicrometer Dimensional and Surface Specifications" <1987, The Hague>
International Symposium on Optical and Optoelectronic Applied Science and Engineering <4, 1987, The Hague>
Fraunhofer IPT ()
displacement; feed system; nc-controller; slide system; table motion system; transducer; ultra precision machine

Table motion systems of high precision machines combine several properties, such as very good displacement accuracy and repeatability, small straightness errors of slides and realization of constant velocities. According to these demands special elements are applied, for example high precision slide systems, linear drive systems and metrology systems. A survey about the properties of these elements will be given. (IPT)