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Surface micromachining on silicon with thick layers
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1995
Conference Paper
Titel
Surface micromachining on silicon with thick layers
Author(s)
Heuberger, A.
Löchel, B.
Hauptwerk
PRODUCTRONICA '95. Symposium on Microsystem Technology. Proceedings
Konferenz
PRODUCTRONICA '95. Symposium on Microsystem Technology 1995
Language
English
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Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT