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1998
Conference Paper
Titel
Surface-micromachined electrostatic microrelay
Abstract
Three variants of electrostatically driven microrelays are reported. These switches have a high off resistance like conventional mechanical relays, but are also characterized by a low power consumption (<10 mu W) and a very low switching time (<50 mu s). These microrelays consist of a cantilever beam, a fixed-fixed beam and a torsion beam with a double-contact configuration. Because of the complete fabrication by surface-micromachining technology, there is no need for a chip-bonding process. This paper reports on design considerations, device concept, fabrication and performance of the microrelay.