Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Surface finish assessment of synthetic quartz glass
| France, C.; Gee, A.E.:
Specification, production, and testing of optical components and systems
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2160-X
S.140-147 |
| International Symposium on Optical Systems and Production <1996, Glasgow> |
|
| Englisch |
| Konferenzbeitrag |
| Fraunhofer IOF () |
| geschliffene Oberfläche; honed surface; Oberflächencharakterisierung; polierte Oberfläche; polished surface; subsurface damage; surface characterization; synthetic quartz glass; synthetisches Quarzglas; Tiefendefekt |
Abstract
Synthetic quartz glass surfaces have been examined after consecutive stages of the manufacturing process: cutting, flat honing, and polishing. Results are presented of microtopography investigations performed using several optical and non-optical methods such as optical and mechanical profilometry, atomic force microscopy , and integrated light scattering. Rms-roughness values have been determined for each step of the surface finishing process. Subsurface damage effects have been imaged by scanning electron microscopy.