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Structural and electrical properties of composite metal / hardcarbon films prepared from metal organics
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1991
Journal Article
Titel
Structural and electrical properties of composite metal / hardcarbon films prepared from metal organics
Author(s)
Eifert, H.
Veltl, G.
Zeitschrift
International Journal of Electronics
Language
English
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Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM
Tags
nanoparticle
plasma polymerization