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Streulichtmessanordnung zur Untersuchung der Oberflaechenrauheit

Scattered light measuring setup to analyze surface roughness
 
: Weigel, T.; Neubert, J.; Hertzsch, A.; Harnisch, B.; Weiss, M.; Schulz, U.

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Frontpage ()

DE 1991-4105509 A: 19910222
DE 1991-4105509 A: 19910222
DE 4105509 C2: 19950810
G01B0011
Deutsch
Patent, Elektronische Publikation
Fraunhofer IOF ()

Abstract
Scattered light measuring setup to analyze surface roughness based on the principle of angular-resolution scattered light measurement by means of one or several receiver arrays, characterized by the fact that the individual receivers of the arrays are arranged on curved supports in such a way that the geometric expansion of the individual receivers corresponds in each case to an equidistant interval within the local frequency range.

: http://publica.fraunhofer.de/dokumente/PX-35065.html