Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Stress-retarded oxidation - expertiments and 2-D simulation

 
: Huber, V.; Lorenz, E.

Proceedings of the 1988 Electronic Devices and Materials Symposium
1988
Electronic Devices and Materials Symposium <1988, Kaohsiung>
Englisch
Konferenzbeitrag
Fraunhofer IFT; 2000 dem IZM eingegliedert
finite elemente; Finite-Elemente-Methode (FEM); LOCOS-Prozeß; oxidation; Prozeßsimulation; simulation

Abstract
Models for Stress-Retarded-Oxidation (SRO) are discussed with respect to their applicability for the simulation of local oxidation. MOS field oxide structures and oxidized trenches were processed for a great range of parameter variations. A 2D numerical simulator was used to characterize the observed stress-effects. (IFT)

: http://publica.fraunhofer.de/dokumente/PX-35059.html