Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Stress-retarded oxidation - expertiments and 2-D simulation

	Proceedings of the 1988 Electronic Devices and Materials Symposium 1988
	Electronic Devices and Materials Symposium <1988, Kaohsiung>

	Englisch
	Konferenzbeitrag
	Fraunhofer IFT; 2000 dem IZM eingegliedert
	finite elemente; Finite-Elemente-Methode (FEM); LOCOS-Prozeß; oxidation; Prozeßsimulation; simulation

Abstract
Models for Stress-Retarded-Oxidation (SRO) are discussed with respect to their applicability for the simulation of local oxidation. MOS field oxide structures and oxidized trenches were processed for a great range of parameter variations. A 2D numerical simulator was used to characterize the observed stress-effects. (IFT)