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Stress free assembly technique for a silicon based pressure sensor

 

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Institute of Electrical and Electronics Engineers -IEEE-:
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
New York/N.Y., 1991
ISBN: 0-87942-585-7
S.986-989
International Conference on Solid-State Sensors and Actuators <6, 1991, San Francisco/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IFT; 2000 dem IZM eingegliedert

: http://publica.fraunhofer.de/dokumente/PX-35050.html