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The STORM technology CAD system

 

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Microelectronics journal 26 (1995), Nr.2-3, S.113-135
ISSN: 0026-2692
ISSN: 0959-8324
Englisch
Zeitschriftenaufsatz
Fraunhofer IIS B ( IISB) ()
CAD/CAM; digital simulation; semiconductor process modelling

Abstract
This paper gives an outline of the STORM TCAD system. STORM is a program system for the two-dimensional simulation of semiconductor fabrication process sequences and the optimization of the electrical behaviour of the devices fabricated. It has been developed within an ESPRIT project by a consortium of European companies and research institutes. In this presentation, the software structure of STORM is described, followed by a discussion of the physical models developed. Finally, some application examples are given.

: http://publica.fraunhofer.de/dokumente/PX-34907.html