Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Statistical accuracy and CPU-time characteristic of three trajectory split methods for Monte-Carlo simulation of ion implantation

 
: Bohmayr, W.; Burenkov, A.; Lorenz, J.; Ryssel, H.; Selberherr, S.

Ryssel, H.; Pichler, P.:
6th International Conference on Simulation of Semiconductor Devices and Processes. SISDEP '95. Proceedings
Wien: Springer, 1995 (Simulation of semiconductor devices and processes 6)
ISBN: 3-211-82736-6
S.488
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) <6, 1995, Erlangen>
Englisch
Konferenzbeitrag
Fraunhofer IIS B ( IISB) ()