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Spin coating in UV depth lithography and 3D microfabrication
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1997
Conference Paper
Titel
Spin coating in UV depth lithography and 3D microfabrication
Author(s)
Engelmann, G.
Dietrich, L.
Renger, E.
Gentzsch, S.
Reichl, H.
Hauptwerk
Sensor '97. Proceedings
Konferenz
Sensor 1997
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM