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Smooth diamond films for optical applications

Glatte Diamantschichten für optische Anwendungen
 
: Koidl, P.; Wild, C.; Locher, R.; Kohl, R.

Yoshikawa, M.; Murakawa, M.; Tzeng, Y.; Yarbrough, W.A.:
ADC '93. 2nd International Conference on the Applications of Diamond Films and Related Materials. Proceedings
Tokyo: MYU, 1993
ISBN: 4-943995-07-1
S.87-94 : Abb.,Lit.
International Conference on the Applications of Diamond Films and Related Materials <2, 1993, Omiya>
Englisch
Konferenzbeitrag
Fraunhofer IAF ()
CVD diamond; Diamantschicht; diamond film; hetero-epitaxy; Heteroepitaxie; heteroepitaxy; morphology; optical coating; optical property; optical window; optische Eigenschaft; oriented nucleation; scattering; Schichtmorphologie; surface smoothness; Textur; texture; textured growth

Abstract
Optically smooth and homogeneous diamond films of mym thickness have been deposited by the combination of high nucleation density growth techniques and dynamic CVD. To overcome the scattering problem associated with grain growth in much thicker films, we studied two concepts to grow oriented diamond films. The stabilization of a smaller than 100 bigger than fibre-texture with coplanar (100) surface facets is shown to be a viable way to achieve optically smooth surfaces. Films grown from oriented seeds via bias- assisted plasma CVD offer the option of an additional azimuthal grain orientation. Their normal orientation and therefore the surface smoothness, however, is presently inferior to the fibre-textured films.

: http://publica.fraunhofer.de/dokumente/PX-34016.html