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Smart CMOS pressure sensor

: Eichholz, J.; Kandler, M.; Manoli, Y.; Mokwa, W.

Automotive Automation Ltd., Croydon:
22nd International Symposium on Automotive Technology and Automation 1990. Proceedings. Vol.2
Croydon: Automotive Automation, 1990
ISBN: 0-947719-36-9
International Symposium on Automotive Technology and Automation (ISATA) <22, 1990, Florence>
Fraunhofer IMS ()
capacitive pressure sensor; planar pressure sensor; pressure sensor array; sensor readout circuit

The fabrication of capacitive pressure sensors using silicon integrated circuit processing is described. The pressure sensors were fabricated using planar etch processing techniques. This results in very small sensors having membrane diameters between 50 micrometers and 150 micrometers. The pressure dependence was studied up to 5 bars. Concepts for on chip signal conditioning by using the switch-capacitor method are given.