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SiO2 protective coatings on plastic optics deposited with plasma-IAD

: Schulz, U.; Jakobs, S.; Kaiser, N.

France, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Developments in optical component coatings : Tagung 15-16 May 1996, Glasgow
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2161-8
Conference "Developments in Optical Component Coatings" <1996, Glasgow>
Fraunhofer IOF ()
Feuchtebarriere; ion assisted deposition; Plasma-IAD; Polycarbonat; polycarbonate; SiO2; water barrier

Plasma ion assisted deposition (plasma-IAD) was used to deposit SiO2 coatings on polycarbonate and on silicon. To study the influence of ion bombardment during the deposition process the bias voltage as an equivalent for ion energy war varied. At a definite bias valur surface microtopography is changed abruptly. Coatings deposited at higher bias voltages show a stable chemical composition and therefore constant optical properties can be expected. It was also found that the barrier effect of coatings against moisture uptake, measured for polycarbonate substrates, increases with bias voltage.