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Advantages and potential of SOI structures for smart sensors

: Vogt, H.

Electrochemical Society -ECS-:
Sixth International Symposium on Silicon-on-insulator technology and devices '94. Proceedings
Pennington/N.J., 1994 (Electrochemical Society. Proceedings 94-11)
ISBN: 1-56677-043-2
International Symposium on Silicon-on-Insulator Technology and Devices <6, 1993, San Francisco/Calif.>
Fraunhofer IMS ()
dielectric isolation; dielektrische Isolation; Meßaufnehmer; microsystem; Mikroelektronik; Mikrosystemtechnik; sensing element; Sensorik; SIMOX

New sensor concepts and sensor systems applying SIMOX for dielectric isolation will be reviewed. Dielectric isolation separates single crystalline silicon islands from the bulk silicon wafer by a dielectric layer. Smart sensors combine sensing devices and readout electronics on a single chip. Silicon on insulator improves sensors concerning mechanical, thermal, and electrical behavior and, equally important, fabrication yield. Readout electronics using CMOS technology on SIMOX will gain by improving high temperature behavior and added functions in an industrial environment.