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Simulation Transport und Lagerung

Simulation of Interbay Transportation and Storage for Multiple Product Waferfabs
: Sturm, R.

Meissner & Wurst GmbH; Submicron Semiconductor Technologies GmbH; Jenoptik AG, Jena; Fraunhofer-Institut für Integrierte Schaltungen -IIS-, Erlangen; Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart; Thesys Gesellschaft für Mikroelektronik, Erfurt:
Smart Fabrication Flexible Fab 1999 : 3. Offener Workshop, 27./28.1.1999 in Tabarz/Thüringen
Workshop Smart Fabrication Flexible Fab <3, 1999, Tabarz/Thüringen>
Fraunhofer IPA ()
ASIC fab; Fertigung; Flexible Fab; Interbay simulation; Lager (Vorrat); Lagerhaltung; Materialfluss; simulation; Smart Fabrication Flexible Fab; wafer; wafer Fabrication

In the course of the Smart Fabrication Flexible Fab project a simulation study was performed to analyze interbay material handling within a multiple product ASIC fab. The simulation model was built with AutoSimulations'AutoSched/AutoMod. An automated overhead monorail system and linear automated stocker systems were integrated in an already existing fab model with complete process equipment park. The fact that the fab layout reaches over two levels re quired the modeling of an elevator system as subsystem of the automated overhead monorail. The aim of the study was to show dynamic interaction between process equipment and material handling equipment as well as to verify transport system dimensioning and storage capacities for each process area by simulation. The simulation model considers the characteristics of an ASIC fab such as several product flows (up to 60), lot prioritization, varying lot sizes, varying release profiles, etc. In view of the huge data quantity the generation of a ll process flows with congruent itineraries was effected from a data base. This approach allows a fast model generation for various production scenarios.