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Silicon sensor systems

 
: Hosticka, B.J.; Brockherde, W.; Hammerschmidt, D.

:

Analog Integrated Circuits and Signal Processing 14 (1997), Nr.3, S.261-273
ISSN: 0925-1030
ISSN: 1573-1979
Englisch
Zeitschriftenaufsatz
Fraunhofer IMS ()
integrierte Halbleiterschaltung; Meßaufnehmer; microsystems; Mikrosystemtechnik; silicium; silicon sensors; smart sensors

Abstract
Silicon sensor systems are based on capability of silicon to serve as a basic material for monolithic cointegration of sensors and electronics. Implementation of this cointegration, its advantages and benefits, and examples of silicon sensor systems form the cental part of this contribution.

: http://publica.fraunhofer.de/dokumente/PX-33522.html