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Silicon microsystems: merging sensors, circuits and systems

: Manoli, Y.; Mokwa, W.

International Conference on Computer Design, VLSI in Computers and Processors 1998. Proceedings
Los Alamitos, Calif.: IEEE Computer Society Press, 1998
ISSN: 1063-6404
ISBN: 0-8186-9099-2
ISBN: 0-8186-9101-8
International Conference on Computer Design, VLSI in Computers & Processors <1998, Austin/Tex.>
Fraunhofer IMS ()
capacitive accelerometers; capacitive pressure sensor; CMOS-compatible micromachining; Drucksensor; epiretinal stimulator; flow meters; implantable sensors; microsystems; Mikrosystemtechnik; multisensor systems; Strömungsmessung; switched capacitor circuits

While the electronic properties of silicon are widely utilized in high-volume IC manufacturing, the use of its mechanical as well as its other properties is still lagging behind. Recent advances in IC-compatible micromachining techniques, however, have created the technological basis for constructing miniature, high-precision, mechanical structures in and on silicon. Thus microsensors and microactuators can be merged together with sophisticated microelectronics to create microsystems. This tutorial shows that besides lowering manufacturing costs, the silicon integration of both sensors and electronics offers several other significant advantages.