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Silicon microsystems for mechatronic applications

 
: Brockherde, W.; Hammerschmidt, D.; Hosticka, B.J.

Lückel, J.:
Mechatronics and Robotics '95. Proceedings
Stuttgart: Teubner, 1995
ISBN: 3-519-02625-2
S.446-455
Mechatronics and Robotics <3, 1995, Paderborn>
Englisch
Konferenzbeitrag
Fraunhofer IMS ()
CMOS-Schaltung; Mikrosystemtechnik; sensor; sensoranwendung

Abstract
While modern microelectronic fabrication processes allow monolithic integration of millions and millions of electronic devices on tiny silicon chips and thus form a technological base for implementation of high-performance electronic systems, they are also capable of realizing sensing and actuating functions. Although this may require some minor changes in standard processing and thus increase the fabrication costs, the unique combination of sensors, actuators, and electronic circuits can provide implementation of miniature microsystems featuring unprecedented functionality. Their principles, potentials, and applications in mechatronic systems are the central topic of this contribution.

: http://publica.fraunhofer.de/dokumente/PX-33513.html