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Silicon microsystems

: Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W.

Proceedings of the Third International Forum on ASIC and Transducer Technology
Banff, 1990
International Forum on ASIC and Transducer Technology <3, 1990>
Fraunhofer IMS ()
microactuator; microsensor; microsystem; sensor readout; signal conditioning

Recent developements in silicon technology allow the implementation of nonelectrical functions and CMOS-electronics on the same silicon substrate. Thus microsensors and microactuators can be merged together with microelectronics to create microsystems. In this contribution we address problems of microsystem implementation and their applications in medicine, environmental protection, high-energy physics, etc. Such systems may contain either sensors fully compatible with standard CMOS technologies, sensors requiring additional processing steps, or sensors on separate substrate. The accompanying microelectronics makes it possible to realize not only sensor readout but also signal conditioning, interfacing, and complex signal processing.