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Sensors/Actuators of the functional ceramics based on Sol-Gel technique for microsystems

: Grimme, R.; Otschik, P.; Gesemann, H.J.

Reichl, H.; Heuberger, A. ; MESAGO Messe Frankfurt GmbH, Stuttgart; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Micro System Technologies '96 : 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17 - 19, 1996
Berlin: VDE-Verlag, 1996
ISBN: 3-8007-2200-3
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components <5, 1996, Potsdam>
Fraunhofer IPA ()
Fraunhofer IKTS ()
Aktor; Aktuator; Keramik; Kleinbetrieb; kleine und mittlere Unternehmen; MicroFab; MikroFab; Mikrofabrikationstechnik; Mikrosystem; Mikrotechnik; Mittelbetrieb; sensor; Serienfertigung; silicium; Sol-Gel-Schicht

This paper reports on the application of ceramic materials on silicon by using the Sol-Gel technique to the fabrication of sensors and actuators in a microsystem (MicroFab concept). The technology steps are described and tools for serial production are proposed which are less complicated and thereby less expensive than tools for the semiconductor technology so that they could be of interest also for small- and medium-sized companies.