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Title
Schaltungsanordnung zur Stromversorgung fuer gepulst betriebene Vakuumboegen
Date Issued
2000
Author(s)
Scheibe, H.J.
Uhlemann, H.J.
Siemroth, P.
Patent No
1990-4037388
Abstract
The invention relates to a circuit arrangement for the power supply for vacuum arcs operated in pulsed mode. Objects to which the invention refers are vacuum arcs operated in pulsed mode which are used, for example, as the plasma source in coating technology and for the mass-spectroscopic analysis of conductive samples. In the circuit arrangement for the power supply for vacuum arcs operated in pulsed mode according to the invention, a diode is arranged in parallel to the discharge gap in such a way that the cathode of the diode is connected to the arc anode and the anode of the diode is connected to the arc cathode.
Language
de
Patenprio
DE 1990-4037388 A: 19901122