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Residual stress in Ni and C monolayers and multilayers produced by pulsed laser deposition

Innere Spannungen in Ni und C Mono- und Multischichten hergestellt mittels Pulsed Laser Deposition -PLD-
 
: Kallis, N.; Mai, H.

Hecht, G. ; Societe Francaise du Vide -SFV-, Paris; Deutsche Vakuum-Gesellschaft:
Thin Films. Proceedings of the joint 4th International Symposium on Trends and New Applications in Thin Films TATF '94 and the 11th Conference on High Vacuum, Interfaces and Thin Films HVITF '94
Oberursel: DGM-Informationsgesellschaft, 1994
ISBN: 3-88355-199-6
S.312-315 : Abb.,Lit.
International Symposium on Trends and New Applications in Thin Films (TATF) <4, 1994, Dresden>
Conference on High Vacuum, Interfaces and Thin Films (HVITF) <11, 1994, Dresden>
Englisch
Konferenzbeitrag
Fraunhofer IWS ()
carbon; dünne Schicht; innere Spannung; Kohlenstoff; monolayer; Monoschicht; multilayer; Multischicht; nickel; PLD; pulsed laser deposition; residual stress; thin films

Abstract
The conditions of layer growth by pulsed laser deposition have been investigated with respect to heat contributions to the substrate, penetration of impacting particles into the films and subsequent arise of compressive stress

: http://publica.fraunhofer.de/dokumente/PX-31802.html