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Remote coupling over 93 mym using ARROW waveguides in strip configuration

 
: Gehler, J.; Bräuer, A.; Karthe, W.

:

Electronics Letters 30 (1994), Nr.3, S.218-219
ISSN: 0013-5194
Englisch
Zeitschriftenaufsatz
Fraunhofer IOF ()
e-beam; Elektronenstrahllithographie; integrated optic; integrierte Optik; remote coupler; Richtkoppler; RIE; siliconoxinitrid; Siliziumoxinitrid; Streifen-ARROW; strip-ARROW

Abstract
A novel waveguide coupler consisting of two antiresonant reflecting optical waveguides in strip-configuration has been developed on Si-SiO2-SiON basis. Remote coupling over a distance of 93 mym has been demonstrated experimentally.

: http://publica.fraunhofer.de/dokumente/PX-31710.html