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Refractive index measurements using an integrated Mach-Zehnder interferometer



Sensors and Actuators. A 60 (1997), Nr.1-3, S.108-112 : Lit.
ISSN: 0924-4247
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Brechzahlmessung; chemischer Sensor; integrierte Optik; Interferometrie; Mach-Zehnder interferometer; Messen; Sensorsystem

In this paper a refractometer system with an integrated optical sensor is presented. The sensitive element is a single or multichannel Mach-Zehnder interferometer (MZI) fabricated on silicon using waveguides made from SiO2, and SiON. The refractometer allows for real time monitoring of refractive indices of gases and liquids in an index range between 1 and 1,49 using the silicon MZI as a low cost consumable part.