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The reaction between ruthenium dioxide and aluminium nitride in resistor pastes.

Die Reaktion zwischen Rutheniumdioxid und Aluminiumnitrid in Widerstandspasten


Journal of Materials Science : JMS 28 (1993), S.5713-5716
ISSN: 0022-2461
ISSN: 1573-4803
Fraunhofer IKTS ()
aluminium nitride; Aluminiumnitrid; Dickschichttechnik; Glas; Glass; paste; resistor; ruthenium dioxide; Rutheniumdioxid; Thermoanalyse; thermoanalysis; thick films; Widerstand

Thermodynamik considerations predict that RuO2 used in resistor pastes for AlN as conductive phase, can be reduced by AlN. In air RuO2 reacts with AlN only to a very small extent. In the presence of a 'non- reducible' glass the reaction between RuO2 and AlN is demonstrated by thermoanalytical, mass spectroscopical and XRD methods. The described reaction could be a reason for bubbles in resistor layers on AlN. A crystallizing glass impedes the complete reaction.