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Quantitative SIMS of hydrogen in a-C:H and Metal-C:H coatings utilizing Hcs. and Ccs+
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1997
Conference Paper
Titel
Quantitative SIMS of hydrogen in a-C:H and Metal-C:H coatings utilizing Hcs. and Ccs+
Author(s)
Willich, P.
Bethke, R.
Hauptwerk
Secondary ion mass spectrometry. Proceedings of the Tenth International Conference on Secondary Ion Mass Spectrometry SIMS X
Konferenz
International Conference on Secondary Ion Mass Spectrometry 1995
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST