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Absolutinterferometrie mit modulierten Halbleiterlasern

Absolut interferometric measurements with tunable diode lasers
: Werle, P.; Jänker, B.

Technisches Messen : TM 63 (1996), Nr.3, S.92-98 : Ill., Lit.
ISSN: 0340-837X
ISSN: 0178-2312
ISSN: 0171-8096
Fraunhofer IFU; 2002 in Helmholtz-Gesellschaft integriert
Absolutinterferometrie; Abstandsmessung; Halbleiterlaser; Phasenmessung

A RF-modulated quasi single sideband interferometer for the measurement of absolute distances and displacements is described. The applied homodyne technique utilizes a low cost commercial 780 nm single-mode diode laser and a high bandwidth detector in a setup which allows modulation up to GHz-frequencies. Synthetic wavelengths can be determined by radio-frequency/microwave synthesizers with a stability of delta lambda S/lambda S < 10(exp -9). For a minimum detectable phase change delta phi(min) of 10(exp -5) in the present experimental setup a resolution of less than 100 mu m has been demonstrated in a folded optical delay with a total optical pathlength of 100 m. Thus a system of delta L/L < 10(exp -6) has been demonstrated. The system characteristics, the experimental setup and the procedure for absolute and relative measurements will be presented and discussed.