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1994
Conference Paper
Titel
Abscheidung von diamantähnlichen Schichten mit Laser-kontrollierter Bogenabscheidung -Laser-Arc-
Alternative
Preparation of diamond-like films by laser-controlled arc deposition -laser-arc-
Abstract
The LASER-ARC, a controlled pulsed arc plasma source combining advantages of the pulsed laser deposition (PLD) technique with the high energy efficiency of a vacuum arc (VAD), was used for DLC-film preparation on different materials. The potential of the LASER-ARC is demonstrated by preparation of high-quality amorphous carbon films (DLC) up to a thickness of 500 nm in a vacuum chamber (10 (exp -4) Pa) at low deposition temperatures (< 200 Cel). By using a laser controlled cathode spot motion of the pulsed arc evaporation of a graphite target, a drastic reduction of macropartical inclusions in the deposited, smooth and dense films is demonstrated. Only particles of about some nm could be found in the amorphous film matrix. Ar plus-bombardment is applied for substrate cleaning and is a reason for enhancing the substrate-film adhesion. An interlayer formation of about 5 nm could be detected. The deposition was carried out without using a substrate bias. The results of studied mechanical, optical and electrical properties demonstrate that the best DLC-films are obtained at low substrate temperatures. Elastic modulus (E) measured by means of ultrasonic surface waves is larger than 250 GPa. By micro-hardness measurement values between 3,000 and 4,000 Vickers hardness are estimated. Tribological studies by a ball on disc arrangement without lubrication show a long life time behavior and a wear on the steel and hardmetall ball but no alteration of the DLC-substrat compound. They could be advantageous for self-lubrication during tribological applications.