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Abscheidung von diamantähnlichen Schichten mit Laser-kontrollierter Bogenabscheidung -Laser-Arc-

Preparation of diamond-like films by laser-controlled arc deposition -laser-arc-
: Drescher, D.; Scheibe, H.J.

Hecht, G. ; Societe Francaise du Vide -SFV-, Paris; Deutsche Vakuum-Gesellschaft:
Thin Films. Proceedings of the joint 4th International Symposium on Trends and New Applications in Thin Films TATF '94 and the 11th Conference on High Vacuum, Interfaces and Thin Films HVITF '94
Oberursel: DGM-Informationsgesellschaft, 1994
ISBN: 3-88355-199-6
International Symposium on Trends and New Applications in Thin Films (TATF) <4, 1994, Dresden>
Conference on High Vacuum, Interfaces and Thin Films (HVITF) <11, 1994, Dresden>
Fraunhofer IWS ()
a-C film; a-C Schicht; Eigenschaft; electrical; elektrisch; Laser-Arc; laser-induced vacuum arc; laser-induzierter Vakuumbogen; mechanical; mechanisch; optical; optisch; property; PVD-Abscheidung; PVD-deposition

The LASER-ARC, a controlled pulsed arc plasma source combining advantages of the pulsed laser deposition (PLD) technique with the high energy efficiency of a vacuum arc (VAD), was used for DLC-film preparation on different materials. The potential of the LASER-ARC is demonstrated by preparation of high-quality amorphous carbon films (DLC) up to a thickness of 500 nm in a vacuum chamber (10 (exp -4) Pa) at low deposition temperatures (< 200 Cel). By using a laser controlled cathode spot motion of the pulsed arc evaporation of a graphite target, a drastic reduction of macropartical inclusions in the deposited, smooth and dense films is demonstrated. Only particles of about some nm could be found in the amorphous film matrix. Ar plus-bombardment is applied for substrate cleaning and is a reason for enhancing the substrate-film adhesion. An interlayer formation of about 5 nm could be detected. The deposition was carried out without using a substrate bias. The results of studied mechanical, optical and electrical properties demonstrate that the best DLC-films are obtained at low substrate temperatures. Elastic modulus (E) measured by means of ultrasonic surface waves is larger than 250 GPa. By micro-hardness measurement values between 3,000 and 4,000 Vickers hardness are estimated. Tribological studies by a ball on disc arrangement without lubrication show a long life time behavior and a wear on the steel and hardmetall ball but no alteration of the DLC-substrat compound. They could be advantageous for self-lubrication during tribological applications.