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Qualification of Products for Equipping Cleanrooms

Qualifizierung von Produkten, die im Reinraum eingesetzt werden
 
: Gommel, U.

Schall Kongreß GmbH:
CleanRooms Europe 1998. Proceedings
PennWell, 1998
International Conference on Advanced Technologies and Practices for Contamination Control <1998, Frankfurt/Main>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
Klassifizieren; Messen; Partikelmessung; Qualifizierung; Qualität; Reinraum; Teilchen

Abstract
As the requirements for the quality of products, produced under cleanroom conditions rise very fast, it is more and more important to be sure of the quality and reliability of used operating materials. By carrying out qualification tests, it is possible to ascertain whether certain product characteristics are reached under customer's production conditions. This presentation gives a short problem scenario, shows the grouping of the equipment to be tested, the requirements to undertake qualification tests, the test procedure, the different steps in reproducable qualification, the measurement methodology and methods.

: http://publica.fraunhofer.de/dokumente/PX-30325.html